YS was born in 1972 in Shanxi, China. He ACY-738 cost received his M.Sc. MK-8931 price degree in electronic engineering from the North University of China, Shanxi, China in 2003. He has published papers on topics including microinertia device design and MEMS device design. His current research interests include microinertia navigation systems and MEMS sensors. Acknowledgments We acknowledge the support from the National Science Foundation of China (61171056, 51105345) and the China Postdoctoral Science Foundation (2011M500544, 2012T50249). References 1. Wen TD, Xu LP,
Xiong JJ, Zhang WD: The meso-piezo-resistive effects in MEMS/NEMS. Solid State Phenomena 2007, 121–123:619–622.CrossRef 2. Xiong JJ, Wang J, Zhang WD, Xue CY, Zhang BZ, Hu J: Piezoresistive effect in GaAs/InxGa1−xAs/AlAs resonant tunneling
diodes for application in micromechanical sensors. Microelectron J 2008, 39:771–776.CrossRef 3. Xue CY, Hu J, Zhang WD, Zhang BZ, Xiong JJ, Chen Y: Integration of GaAs/In0.1Ga0.9As/AlAs resonance tunneling heterostructures into micro-electro-mechanical systems for sensor applications. Physica Status Solidi A 2010, 207:462–467.CrossRef 4. Xiong JJ, Zhang WD, Mao HY, Wang KQ: Research on double-barrier resonant tunneling effect based stress measurement methods. Sensors and Actuators A 2009, 150:169–174.CrossRef 5. Li B, Zhang W, Xie B, Xue C, Xiong J: Development of a novel GaAs micromachined accelerometer based on resonant tunneling diodes. Sensors and Actuators 4SC-202 A 2008, 143:230–236.CrossRef 6. Guan LG, Zhang GJ, Xu J, Xue CY, Zhang WD, Xiong JJ: Design of T-shape vector hydrophone based on MEMS. Sensors and Actuators A 2012, 188:35–40.CrossRef 7. Azeza B, Sfaxi L, M’ghaieth R, Fouzri A, Maaref H: Growth of n-GaAs layer on a rough surface of p-Si substrate by molecular beam epitaxy (MBE) for photovoltaic
applications. Journal of Crystal Growth 2011, 317:104–109.CrossRef 8. Mohammed AAS, Moussa WA, Edmond L: High sensitivity MEMS strain sensor: design BCKDHA and simulation. Sensors 2008, 8:2642–2661.CrossRef 9. Richter M, Rossel C, Webb DJ, Topuria T, Gerl C, Sousa M, Marchiori C, Caimi D, Siegwart H, Rice PM, Fompeyrine J: GaAs on 200 mm Si wafers via thin temperature graded Ge buffers by molecular beam epitaxy. J Cryst Growth 2011, 323:387–392.CrossRef 10. Vanamu G, Datye AK, Dawson R, Zaidi SH: Growth of high-quality GaAs on Ge/Si 1−x Ge x on nanostructured silicon substrates. Appl Phys Lett 2006,88(251909):1–3. 11. Shi YB, Guo H, Ni HQ, Xue CY, Niu ZC, Tang J, Liu J, Zhang WD, He JF, Li MF, Yu Y: Optimization of the GaAs-on-Si substrate for microelectromechanical systems (MEMS) sensor application. Materials 2012, 5:2917–2926.CrossRef 12. Cho HJ, Oh KW, Ahn CH, Boolchand P: Stress analysis of silicon membranes with electroplated perm alloy films using Raman scattering. IEEE Trans Magn 2001, 37:2749–2751.CrossRef 13. Ferraro JR, Nakamoto K: Introductory Raman Spectroscopy. New York: Academic; 1994. 14.